Probe polishing method and probe polishing member

Details Probe polishing method and probe polishing member Probe polishing method and probe polishing member

2006-12-15

2008-12-16

Rose, Robert (Department: 3723)

Abrading

Abrading process

C451S059000

Reexamination Certificate

active

07465218

ABSTRACT:
In a probe polishing method, a plurality of probes, which are arranged on a probe card for performing an inspection of electrical characteristics of a target object, are polished by using a polishing member. Further, the probes are polished over plural times, while changing a relative position of the abrasive sheet with respect to the probe card.

REFERENCES:
patent: 5897424 (1999-04-01), Evans et al.
patent: 6024629 (2000-02-01), Takekoshi
patent: 6306187 (2001-10-01), Maeda et al.
patent: 6741086 (2004-05-01), Maekawa et al.
patent: 7182672 (2007-02-01), Tunaboylu et al.

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