Piezoelectric MEMS element and tunable filter equipped with...

Details Piezoelectric MEMS element and tunable filter equipped with... Piezoelectric MEMS element and tunable filter equipped with...

2005-09-20

2008-12-30

San Martin, J. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S309000, C310S331000, C310S332000, C200S181000

Reexamination Certificate

active

07471031

ABSTRACT:
In a MEMS type variable capacity having a piezoelectric driving mechanism, a movable head having movable electrodes are arranged thereon, stationary electrodes is positioned to face the movable electrodes, and a piezoelectric driving beam structure is joined to the movable head and have one end fixed to the substrate. The movable electrode and the stationary electrode form a variable capacity. In the variable capacity, the distance and capacitance between the movable electrode and the stationary electrode of the variable capacity can be maintained constant so as to realize a reproducibility and a reliable controllability.

REFERENCES:
patent: 2004/0075364 (2004-04-01), Mehta
patent: 2005/0194867 (2005-09-01), Kawakubo et al.
patent: 2005/0242687 (2005-11-01), Kawakubo et al.
patent: 2006/0055287 (2006-03-01), Kawakubo et al.
patent: 2006/0098059 (2006-05-01), Ohguro et al.
patent: 2006/0119227 (2006-06-01), Ikehashi
patent: 2006/0152111 (2006-07-01), Allison et al.
patent: 2003-258502 (2003-09-01), None
U.S. Appl. No. 11/196,596, filed Aug. 4, 2005, Takashi Kawakubo et al.
U.S. Appl. No. 11/115,107, filed Apr. 27, 2005, Takashi Kawakubo et al.
U.S. Appl. No. 11/039,872, filed Jan. 24, 2005, Takashi Kawakubo et al.
U.S. Appl. No. 11/151,343, filed Jun. 14, 2005, Abe et al.
U.S. Appl. No. 11/229,694, filed Sep. 20, 2005, Kawakubo et al.

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