Capacitor and its manufacturing method

Details Capacitor and its manufacturing method Capacitor and its manufacturing method

2007-01-24

2008-12-16

Thomas, Eric (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

C029S025420, C310S364000

Reexamination Certificate

active

07466537

ABSTRACT:
A method for manufacturing a capacitor includes the steps of: forming a lanthanum nickelate layer above a base substrate; forming a dielectric layer above the lanthanum nickelate layer; forming a conductive layer above the dielectric layer; and patterning at least the dielectric layer until the lanthanum nickelate layer is exposed.

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patent: 2003/0062553 (2003-04-01), Ramesh et al.
patent: 05-286132 (1993-11-01), None
“Effect of textured LaNiO3 electrode on teh fatigue improvement of Pb(Zr0.53Ti0.47) thin films”, Ming-Sen Chen, Tai-Bor Wu and Jenn-Ming Wu, 1996 American Institute of Physics, Appl. Phys. Lett. 68 (10), Mar. 4, 1996 (pp. 1430-1432).
“Low-Temperature growth of epitaxial LaNiO3/Pb (Zr0.52Ti0.48)O3/LaNiO3 on Si(001) by pulsed-laser deposition”, Webin Wu, K.H. Wong and C.L. Choy, 2000 American Vacuum Society, J. Vac. Sci. Technol.A 18(1), Jan./Feb. 2000, (pp. 79-82).
Jpn. J. Appl. Phys. vol. 35 (1996) pp. 4743-4749.

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