Lithographic apparatus and device manufacturing method...

Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper

Reexamination Certificate

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C355S053000

Reexamination Certificate

active

07456935

ABSTRACT:
A positioning device for positioning an object table includes a frame for supporting the object table in a first direction and a motor constructed and arranged to exert a first force on the object table in a second direction substantially perpendicular to the first direction and a second force on the object table in a third direction substantially perpendicular to the first direction and the second direction. A first part of the motor is constructed and arranged to co-operate with a second part for generating the first and second force. The first part is arranged on the object table, such that both the first force and the second force are directed substantially through the center of gravity of the object table.

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Compter, J.C., “Electro-Dynamic Planar Motor”, Precision Engineering, 28(2):171-180, Apr. 2004, 13 pgs.
Dirk-Jan van Lubek, “Demonstrator of a φ-z Motor”, M. Sc. Thesis, Jul. 2000, 80 pgs.

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