Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2005-12-21
2008-12-16
Rutledge, Della J. (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S071000, C359S318000
Reexamination Certificate
active
07466394
ABSTRACT:
A lithographic apparatus comprising an array of individually controllable elements that modulates a beam of radiation and a projection system that projects the modulated beam onto the substrate. The individually controllable elements are provided with a compensation feature that is arranged to provide compensation radiation that substantially or at least partially cancels out unwanted radiation, such that the unwanted radiation is not projected by the projection system onto the substrate.
REFERENCES:
patent: 4993824 (1991-02-01), Bluege
patent: 5229872 (1993-07-01), Mumola
patent: 5296891 (1994-03-01), Vogt et al.
patent: 5500736 (1996-03-01), Koitabashi et al.
patent: 5523193 (1996-06-01), Nelson
patent: 5530482 (1996-06-01), Gove et al.
patent: 5579147 (1996-11-01), Mori et al.
patent: 5677703 (1997-10-01), Bhuva et al.
patent: 5808797 (1998-09-01), Bloom et al.
patent: 5982553 (1999-11-01), Bloom et al.
patent: 6133986 (2000-10-01), Johnson
patent: 6177980 (2001-01-01), Johnson
patent: 6473237 (2002-10-01), Mei
patent: 6687041 (2004-02-01), Sandstrom
patent: 6747783 (2004-06-01), Sandstrom
patent: 6795169 (2004-09-01), Tanaka et al.
patent: 6806897 (2004-10-01), Kataoka et al.
patent: 6811953 (2004-11-01), Hatada et al.
patent: 7106490 (2006-09-01), Sandstrom
patent: 2004/0041104 (2004-03-01), Liebregts et al.
patent: 2004/0130561 (2004-07-01), Jain
patent: 2005/0007572 (2005-01-01), George et al.
patent: WO 98/33096 (1998-07-01), None
patent: WO 98/38597 (1998-09-01), None
U.S. Appl. No. 10/995,092, filed Nov. 24, 2004, Baba-Ali.
U.S. Appl. No. 11/018483, filed Dec. 22, 2004, Baba Ali et al.
U.S. Appl. No. 11/020,138, filed Dec. 27, 2004, Roux.
Baselmans Johannes Jacobus Matheus
Troost Kars Zeger
ASML Netherlands B.V.
Rutledge Della J.
Sterne Kessler Goldstein & Fox P.L.L.C.
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