Integrated etched multilayer grating based wavelength...

Optical waveguides – With optical coupler – Input/output coupler

Reexamination Certificate

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C385S015000, C385S031000

Reexamination Certificate

active

07447403

ABSTRACT:
An integrated etched multilayer grating-based wavelength multiplexer/demultiplexer is disclosed wherein an etched multilayer grating structure is monolithically integrated within the optical waveguide stack of the multiplexer/demultiplexer to reflectively diffract an input optical beam. The multilayer grating structure is generally comprised of a series of etched diffractive elements and an etched multilayer reflector, the combined optical response of which providing the desired multiplexing/demultiplexing effect. The etched structures are generally comprised of shallow etch structures in a top surface of the multiplexer/demultiplexer waveguide stack. Monolithically integrated input and output ridge waveguides may also be provided, optionally fabricated in a same etching step as the etched multilayer grating.

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V. Tolstikhin et al “Monolithically Integrated Optical Channel Monitor for DWDM Transmission Systems”Journal of Lightwave Technology, vol. 22, No. 1, pp. 146-153, 2004.

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