Organic compounds -- part of the class 532-570 series – Organic compounds – Oxygen containing
Reexamination Certificate
2006-08-10
2008-12-16
Le, Hoa V (Department: 1795)
Organic compounds -- part of the class 532-570 series
Organic compounds
Oxygen containing
C568S616000, C568S649000, C568S674000, C568S685000
Reexamination Certificate
active
07465837
ABSTRACT:
Fluorinated vinyl ethers are provided having the structure of formula (I) the structure of formula (I)wherein at least one of X and Y is a fluorine atom, and L, R1, R2, R3, R4are as defined herein. Also provided are copolymers prepared by radical polymerization of (I) and a second monomer that may not be fluorinated. The polymers are useful in lithographic photoresist compositions, particularly chemical amplification resists. In a preferred embodiment, the polymers are substantially transparent to deep ultraviolet (DUV) radiation, and are thus useful in DUV lithographic photoresist compositions. A method for using the composition to generate resist images on a substrate is also provided, i.e., in the manufacture of integrated circuits or the like.
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Abstract of Jp 2002220416. Aug. 9, 2002.
Machine English language translation of Jp 2002220416. Aug. 9, 2002.
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DiPietro Richard A.
Ito Hiroshi
International Business Machines - Corporation
Le Hoa V
Mintz Levin Cohn Ferris Glovsky and Popeo P.C.
Rutenberg Isaac M.
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