Systems and methods for isolation of torque and sense...

Details Systems and methods for isolation of torque and sense... Systems and methods for isolation of torque and sense...

2006-10-18

2008-08-12

Kwok, Helen C. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

Reexamination Certificate

active

07409862

ABSTRACT:
A Micro Electromechanical Systems (MEMS) accelerometer device having a proof mass flexibly attached to a substrate. The device includes one or more sense capacitors formed between the proof mass and the substrate, one or more torque capacitors formed between the proof mass and the substrate, and an isolation device that electrically isolates cathodes of the sense capacitors from cathodes of the torque capacitors on the proof mass.

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patent: 2320571 (1998-06-01), None
patent: 2008010931 (2008-01-01), None

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