Registration target design for managing both reticle grid...

Details Registration target design for managing both reticle grid... Registration target design for managing both reticle grid...

2006-02-17

2008-08-05

Punnoose, Roy M (Department: 2886)

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

C356S399000

Reexamination Certificate

active

07408642

ABSTRACT:
A combined overlay target and methods for its use are disclosed. The combined overlay target includes a grating-type overlay target and an image placement error target having substantially perpendicular features with spaced apart edges. The grating-type target and the image placement error target have a common centroid and are sufficiently separated that the grating-type overlay target does not interfere with measurement of image placement error.

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patent: 2005/0094145 (2005-05-01), Lin

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