Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2005-05-27
2008-10-07
San Martin, J. A (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S324000, C310S369000, C333S187000, C333S189000
Reexamination Certificate
active
07432631
ABSTRACT:
A piezoelectric thin-film resonator includes a device substrate and a laminated body provided on the device substrate and composed of a lower electrode, an upper electrode and a piezoelectric film sandwiched between the lower and upper electrodes. The laminated body has a membrane portion in which the upper and lower electrodes overlap with each other through the piezoelectric film, and a gap has a dome shape being formed between the device substrate and the lower electrode and located below the membrane portion.
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Iwaki Masafumi
Miyashita Tsutomu
Nishihara Tokihiro
Sakashita Takeshi
Taniguchi Shinji
Arent & Fox LLP
Fujitsu Limited
Fujitsu Media Devices Limited
Martin J. A San
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