Interferometry systems and methods

Details Interferometry systems and methods Interferometry systems and methods

2005-03-15

2008-08-26

Lee (Andrew), Hwa S (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S503000

Reexamination Certificate

active

07417743

ABSTRACT:
In general, in a first aspect, the invention features apparatus that include an interferometer having a main cavity and an auxiliary reference surface, the main cavity including a primary reference surface and a test surface. The interferometer is configured to direct a primary portion of input electromagnetic radiation to the main cavity and an auxiliary portion of the input electromagnetic radiation to reflect from the auxiliary reference surface, wherein a first portion of the primary portion in the main cavity reflects from the primary reference surface and a second portion of the primary portion in the main cavity reflects from the test surface. The interferometer is further configured to direct the electromagnetic radiation reflected from the test surface, the primary reference surface, and the auxiliary reference to a multi-element detector to interfere with one another to form an interference pattern.

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