Pressure sensor and substrate processing apparatus

Details Pressure sensor and substrate processing apparatus Pressure sensor and substrate processing apparatus

2006-05-01

2008-08-12

Noori, Max (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

Reexamination Certificate

active

07409864

ABSTRACT:
A pressure sensor comprises a thin disk-shaped diaphragm, a laser displacement meter for detecting an amount of deformation of the diaphragm, and an operation part connected to the laser displacement meter. In the pressure sensor, an amount of deformation of the diaphragm due to pressure of fluid flowing into the pressure sensor is detected by the laser displacement meter, and pressure of the fluid is obtained on the basis of the amount of deformation and conversion information stored in the operation part in advance. The base part of the diaphragm of the pressure sensor is made of graphite (or silicon substrate), and a thin film of silicon carbide which is in contact with fluid is formed on a surface of the base part. This improves chemical resistance to the pressure sensor and extends the lifetime of the pressure sensor while preventing metal elution.

REFERENCES:
patent: 6561039 (2003-05-01), Ozawa
patent: 7337677 (2008-03-01), Mizohata
patent: 2006/0112771 (2006-06-01), Mizohata
patent: 2007/0042511 (2007-02-01), Abiko et al.
patent: 7-72029 (1995-03-01), None
patent: 2002-310823 (2002-10-01), None

Affiliated with

Also associated with

Rating

Pressure sensor and substrate processing apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Pressure sensor and substrate processing apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Pressure sensor and substrate processing apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4008754