Vacuum micropump and gauge

Details Vacuum micropump and gauge Vacuum micropump and gauge

2004-06-28

2008-08-19

Freay, Charles G (Department: 3746)

Pumps

Electrical or getter type

C417S050000

Reexamination Certificate

active

07413412

ABSTRACT:
A vacuum micropump for use in a sealed package includes at least one pumping cell and a magnetic field proximate to the pumping cell. The pumping cell has at least one anode, at least one dielectric in contact with the at least one anode, at least one titanium cathode in contact with the dielectric and an electric field between the at least one anode and the at least one cathode. The dielectric defines a space between the at least one anode and the at least one cathode. The vacuum micropump may be used to gauge pressure within the sealed package. An appropriate method of use is also provided.

REFERENCES:
patent: 3596123 (1971-07-01), Levin
patent: 4460317 (1984-07-01), Kern et al.
patent: 4594054 (1986-06-01), Ishimaru et al.
patent: 4631002 (1986-12-01), Pierini
patent: 5655886 (1997-08-01), Alderson
patent: 5980212 (1999-11-01), Shen et al.
patent: 6264433 (2001-07-01), Spagnol
“Miniature Sputter-Ion Pump Design Considerations” by S.L. Rutherford; 1999 NASA/JPL Miniature Vacuum Pumps Workshop, Jul. 20-21, 1999.

Affiliated with

Also associated with

Rating

Vacuum micropump and gauge does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Vacuum micropump and gauge, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Vacuum micropump and gauge will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4008128