Wafer measuring fixture

Details Wafer measuring fixture Wafer measuring fixture

2005-09-05

2008-10-07

Noland, Thomas P (Department: 2856)

Supports

With indicator or inspection means

C073S865800

Reexamination Certificate

active

07431260

ABSTRACT:
A wafer-measuring fixture suitable for carrying a broken wafer is described. The wafer-measuring fixture comprises a base having a carrying component. The carrying component is used to hold the broken wafer. Furthermore, a plurality of scale marks is set around the carrying component to mark the broken positions on the wafer.

REFERENCES:
patent: 3572400 (1971-03-01), Hance et al.
patent: 4228428 (1980-10-01), Niedermeyer
patent: 5092557 (1992-03-01), Sawatzki
patent: 6545752 (2003-04-01), Swan et al.
patent: 2004/0225385 (2004-11-01), Takagi et al.

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