Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate
2006-06-14
2008-10-07
Huff, Mark F. (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
Reexamination Certificate
active
07432025
ABSTRACT:
The invention includes reticle constructions and methods of forming reticle constructions. In a particular aspect, a method of forming a reticle includes provision of a reticle substrate having a defined main-field region and a defined boundary region. The substrate has a relatively transparent base and a relatively opaque material over the base. A thickness of the relatively opaque material of the main-field region is reduced relative to a thickness of the relatively opaque material of the boundary region. A reticle construction of the present invention can comprise a relatively transparent base, and a relatively opaque material over the base. The construction can have a defined main-field region and a defined boundary region, and the relatively opaque material of the main-field region can have a reduced thickness relative to the relatively opaque material of the boundary region.
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“Initial Study of the Fabrication of Step and Flash Imprint Lithography Templates For The Printing of Contact Holes”; Resnick et al.; J. Microlith., Microfab., Microsyst., vol. 3, No. 2; Apr. 2004; pp. 316-321.
Fraser Stewart A
Huff Mark F.
Micro)n Technology, Inc.
Wells St. John P.S.
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