Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2004-08-25
2008-10-14
Lester, Evelyn A. (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S224200, C359S295000, C359S298000, C353S030000, C353S034000, C353S037000, C353S049000, C353S078000, C353S098000, C353S099000
Reexamination Certificate
active
07436572
ABSTRACT:
A spatial light modulator is disclosed, along with methods for making such a modulator. The spatial light modulator comprises an array of micromirrors each having a hinge and a micromirror plate held via a hinge on a substrate, the micromirror plate being attached to the hinge such that the micromirror plate can rotate along a rotation axis and the hinge structure is located between the micromirror plate and the light source. The mirror plate is formed between the hinge and the substrate on which the hinge is formed. As a result, the hinge is exposed to the incident light during the operation.
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Huibers Andrew
Patel Satyadev
Brady III Wade James
Lester Evelyn A.
Telecky , Jr. Frederick J.
Texas Instruments Incorporated
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