Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2003-10-24
2008-08-19
Budd, Mark (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S346000
Reexamination Certificate
active
07414349
ABSTRACT:
A piezoelectric vibrator has a laminated structure where silicon oxide films having substantially the same thickness are disposed at both faces of piezoelectric plate as dielectric films. Using the structure discussed above, because dielectric films are formed at the both faces of the piezoelectric plate a difference of internal stress, which is caused by a difference of stress relaxation in a long term and affects the piezoelectric plate or the dielectric film, becomes small. Therefore, a warp can be considerably small. As a result, a change, which is caused by the warp of the piezoelectric vibrator, in a resonance frequency of the piezoelectric vibrator can be small.
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Budd Mark
Matsushita Electric - Industrial Co., Ltd.
RatnerPrestia
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