Optics: measuring and testing – Shape or surface configuration
Reexamination Certificate
2005-07-15
2008-10-07
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
Shape or surface configuration
C356S301000, C356S319000, C356S326000, C356S625000
Reexamination Certificate
active
07433056
ABSTRACT:
A system for characterizing material properties in miniature semiconductor structures performs a scatterometry analysis on inelastically scattered light. The system can include a narrowband probe beam generator and a detector. A single wavelength probe beam from the narrowband probe beam generator produces scattered light from a measurement pattern on a test sample. The scattered light is measured by the detector, and the measurement data (e.g., Raman spectrum) is used in a scatterometry analysis to determine material properties for the measurement pattern. The detector can measure either incoherent inelastically scattered light (e.g., using a spectrometer) or coherent inelastically scattered light (e.g., using an array detector). If the measurement pattern dimensions are substantially similar to actual device dimensions, the material property distributions determined for the measurement pattern can be applied to the actual devices on the test sample.
REFERENCES:
patent: 6067154 (2000-05-01), Hossain et al.
patent: 6545755 (2003-04-01), Ishihama et al.
patent: 6924893 (2005-08-01), Oldenbourg et al.
Bever Hoffman & Harms LLP
Harms Jeanette S.
KLA-Tencor Technologies Corporation
Stock, Jr. Gordon J
Toatley , Jr. Gregory J.
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