Functional device and method for producing the same, and...

Details Functional device and method for producing the same, and... Functional device and method for producing the same, and...

2005-07-14

2008-08-12

Pert, Evan (Department: 2826)

Semiconductor device manufacturing: process

Chemical etching

Vapor phase etching

C438S738000

Reexamination Certificate

active

07410906

ABSTRACT:
A method of producing a functional device comprising an electrode layer provided as an upper layer of a layer containing an organic material, the layer being as a functional layer, wherein a step of patterning the electrode layer comprises a high speed etching step of etching the electrode layer at a rate of 10 nm/min or more.

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