Pattern forming method and apparatus, and device fabrication...

Details Pattern forming method and apparatus, and device fabrication... Pattern forming method and apparatus, and device fabrication...

2005-06-20

2008-08-19

Stinson, Frankie L (Department: 1792)

Cleaning and liquid contact with solids

Apparatus

With spray or jet supplying and/or applying means

C134S902000, C015S321000

Reexamination Certificate

active

07412983

ABSTRACT:
The invention saves resources and energy. A cleaning/fluid-feeding head integrates a cleaning head portion and a fluid-feeding head portion. The cleaning head portion includes an organic substance cleaning unit, an inorganic substance cleaning unit, a rinsing unit and a drying unit. The organic substance cleaning unit, inorganic substance cleaning unit and rinsing unit selectively clean pattern forming regions on a substrate by feeding thereto a first cleaning fluid, second cleaning fluid and pure water, respectively. The drying unit dries the rinsed pattern forming regions by blowing hot air thereonto. The fluid-feeding head portion selectively feeds a liquid pattern forming material to the cleaned pattern forming regions.

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