Micromirror array device with compliant adhesive

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package

Reexamination Certificate

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C257S684000, C257SE23188, C257SE23193

Reexamination Certificate

active

07408250

ABSTRACT:
A microstructure is packaged with a device substrate of the microstructure being attached to a package substrate. For dissipating possible deformation of the microstructure, which may result in device failure or quality degradation of the microstructure, an adhesive material comprising a compliant adhesive component is applied and positioned between the device substrate and package substrate.

REFERENCES:
patent: 4178077 (1979-12-01), Te Velde
patent: 4309242 (1982-01-01), Te Velde
patent: 5010233 (1991-04-01), Henschen et al.
patent: 5175409 (1992-12-01), Kent
patent: 5293511 (1994-03-01), Poradish et al.
patent: 5527744 (1996-06-01), Mignardi et al.
patent: 5621162 (1997-04-01), Yun et al.
patent: 5702764 (1997-12-01), Kimuara et al.
patent: 5835256 (1998-11-01), Huibers
patent: 5872046 (1999-02-01), Kaeriyama et al.
patent: 5915168 (1999-06-01), Salatino et al.
patent: 5952572 (1999-09-01), Yamashita et al.
patent: 5963289 (1999-10-01), Stefanov et al.
patent: 5998242 (1999-12-01), Kirkpatrick et al.
patent: 6046840 (2000-04-01), Huibers
patent: 6072236 (2000-06-01), Akram et al.
patent: 6164837 (2000-12-01), Haake et al.
patent: 6165885 (2000-12-01), Gaynes et al.
patent: 6207548 (2001-03-01), Akram et al.
patent: 6232150 (2001-05-01), Lin et al.
patent: 6252229 (2001-06-01), Hays et al.
patent: 6265246 (2001-07-01), Ruby et al.
patent: 6287940 (2001-09-01), Cole et al.
patent: 6297072 (2001-10-01), Tilmans et al.
patent: 6303986 (2001-10-01), Shook
patent: 6323550 (2001-11-01), Martin et al.
patent: 6353492 (2002-03-01), McClelland et al.
patent: 6458627 (2002-10-01), Choi
patent: 6459523 (2002-10-01), Ueda
patent: 6528344 (2003-03-01), Kang
patent: 6541832 (2003-04-01), Coyle
patent: 6614003 (2003-09-01), Hembree et al.
patent: 6624003 (2003-09-01), Rice
patent: 6649446 (2003-11-01), Goetz et al.
patent: 6661084 (2003-12-01), Peterson et al.
patent: 6674159 (2004-01-01), Peterson et al.
patent: 6704131 (2004-03-01), Liu
patent: 6791735 (2004-09-01), Stappaerts
patent: 6810899 (2004-11-01), Franz et al.
patent: 6900072 (2005-05-01), Patel et al.
patent: 6953985 (2005-10-01), Lin et al.
patent: 2001/0007372 (2001-07-01), Akram et al.
patent: 2001/0022207 (2001-09-01), Hays et al.
patent: 2001/0034076 (2001-10-01), Martin
patent: 2001/0040675 (2001-11-01), True et al.
patent: 2001/0048064 (2001-12-01), Kitani
patent: 2002/0063322 (2002-05-01), Robbins et al.
patent: 2002/0117728 (2002-08-01), Brosnihhan et al.
patent: 2002/0146200 (2002-10-01), Kudrie et al.
patent: 2002/0180016 (2002-12-01), Shrauger et al.
patent: 2003/0000737 (2003-01-01), Liu et al.
patent: 2003/0008477 (2003-01-01), Kang et al.
patent: 2003/0047533 (2003-03-01), Reid et al.
patent: 2003/0089394 (2003-05-01), Chang-Chien et al.
patent: 2003/0161027 (2003-08-01), Kurosawa et al.
patent: 2003/0211654 (2003-11-01), Kocian et al.
patent: 2004/0035840 (2004-02-01), Koopmans
patent: 2004/0067604 (2004-04-01), Ouellet et al.
patent: 2004/0119143 (2004-06-01), Karpman
patent: 2004/0190112 (2004-09-01), Huibers
patent: 2004/0232535 (2004-11-01), Tarn
patent: 2005/0101059 (2005-05-01), Yang
patent: 1097901 (2001-05-01), None
patent: 1101730 (2001-05-01), None
patent: 1167281 (2002-01-01), None
patent: 2001129800 (2001-05-01), None
patent: 2001144117 (2001-05-01), None
patent: 2001196484 (2001-07-01), None
patent: WO-01/10718 (2001-02-01), None
patent: WO-01/20671 (2001-03-01), None
patent: WO-02/12116 (2002-02-01), None
patent: WO-02/12116 (2002-02-01), None
US 6,724,518, 04/2004, Meyer et al. (withdrawn)
Y.T. Cheng, et al.,“Localized Silicon Fusion and Eutectic Bonding for MEMS Fabrication and Packaging”, Journal of Microelectromechanical Systems, vol. 9, No. 1, Mar. 2000, pp. 3-8.
Liwei Lin, “MEMS Post-Packaging by Localized Heating and Bonding”, 2000 IEEE, pp. 608-616.
Farhad Sarvar, et al., Application of Adhesives in MEMS and MOEMS Assembly: A Review, IEEE Polytronic 2002 Conference, pp. 22-28.
Seong-A Kim, et al., “Closed Loop Solder-Lines on Heated Substrates”, 2002 Electronic Components and Technology Conference, pp. 1101-1105.
Giles Huimpston and David M. Jacobson, “Principles of Soldering and Brazing”, ASM International, pp. 242-245-7.3.2.3 Solution.
Balaji Sridharan, et al., Post-Packaging Release a New Concept for Surface Micromachined Devices, Mechanical and Aerospace Engineering Department, 4 pgs.
U. Gosele, et al., Wafer Bonding for Microsystems Technologies, Sensors and Actuators 74 (1999) pp. 161-168.
Masao Segawa, et al., A CMOS Inage Sensoer Module Applied for a Digital Still Camera Utilizing the Tab on Glass (TOG) Bonding Method, IEEE Transactions on Advanced Packaging, vol. 22, No. 2.
In-Byeong Kang, et al., The Application of Anisotropic Conductive Films for Realisation of Interconnects in Micromechanical Structures, SPIE vol. 3321, pp. 233-238.
Sonja van der Groen, et al., CMOS Compatible Wafer Scale Adhesive Bonding for Circuit Transfer, International Conference on Solid-State Sensors and Actuators, Chicago, Jun. 16-19, 1997, pp. 629-632.
G. Blink, et al., Wafer Bonding With an Adhesive Coating, Part of the SPIE Conference on Micromachined Devices and Components IV, Santa Clara, California, Sep. 1998, pp. 50-61.
Christine Kallmayer, et al., A New Approach to VHIP Size Package Using Meniscus Soldering and FPC-Bonding, IEEE Transactions on Components Packaging and Manufacturing Technology-Part C., vol. 21, No. 1., Jan. 1998, pp. 51-56.
Joachim Kloeser, et al., Low Cost Bumping by Stencil Printing: Process Qualification for 200 UM Pitch, 1998 International Synposium on Microelectronics, 11 Pgs.
Michel M. Maharbiz, et al., Batch Micropackaging by Conpression-Bonded Wafer-Wafer Transfer, Microassembly Technologies, Inc, 8 Pgs.
Bharat Shivkumar, et al., Microrivets for MEMS Packaging:Concept, Fabriaction, and Strength Testing, Journal of Microlectroomechanical Systems, vol. 6, No. 3, Sep. 1997, pp. 217-224.
Hideki Takagi, et al., Room Temperature Silicon Wafer Direct Bonding in Vacuum by Ar Beam Irradiation, Mechanical Engineering Laboratory, AIST. MITI., 6 Pgs.
Michael H. Beggans, et al., Optical Pressure Sensor Head Fabrication Using Ultra-Thin Silicon Wafer Anodic Bonding, Part of the Symposium on Design, Test, and Microfabrication of MEMS and MOEMS, 10 Pgs.
T.P Glenn, et al., Designing MEMS into Systems:Packaging Issues, http://www.ecnmag.com, 4 Pgs.
Kwon Sang Jik et al., Vacuum In-line Sealing Technology with Auxiliary Heating Line for PDP Packaging, p. 320, Society for Information Display Digest 2002.
Espinosa et al., “Identification of Residual Stress State in an RF-MEMS Device”, MTS Systems Corporation white paper (May 2000).
Franka et al., “Solder Bump Technology: Present and Future”, Semiconductor Fabtech (May 1995).
Glenn et al., “Packaging Microscopic Machines”, Machine Design (Dec. 7, 2000).
Harsh et al., “Flip-Chip Assembly for Si-Based MEMS”, Proceedings of the 1999 IEEE International Conference on Microelectromechanical Systems (MEMS '99), Orlando, FL (Jan. 17-21, 1999), pp. 273-278.
Irwin et al., “Quick Prototyping of Flip Chip Assembly with MEMS”, University of Colorado at Boulder white paper (Jul. 17, 2000).
Irwin et al., “Quick Prototyping of Flip-Chip Assembly with MEMS”, portions of slide presentation from the NSF Center for Advanced Manufacturing and Packaging of Microwave, Optical and Digital Electronics at the University of Colorado at Boulder (1998).
Lee et al., “High-Q Tunable Capacitors and Multi-way Switches Using MEMS for Millimeter-Wave Applications”, portions of slide presentation from the NSF Center for Advanced Manufacturing and Packaging of Microwave, Optical and Digital Electronics at the University of Colorado at Boulder (Sep. 1998).
Lee et al., “Use of Foundry Services to Prototype MEMS for Millimeter-wave Applications”, portions of slide presentation from the NSF Center for Advanced Manufacturing and Packaging of Microwave, Optical and Digital Electronics at the University of Colorado at Boul

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