Angular velocity sensor and method for manufacturing the same

Details Angular velocity sensor and method for manufacturing the same Angular velocity sensor and method for manufacturing the same

2005-06-30

2008-10-14

Budd, Mark (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S312000

Reexamination Certificate

active

07436107

ABSTRACT:
Provided is an angular velocity sensor which is thin, requires no individual adjustment and can control the generation of signals that are unnecessary to the angular velocity sensor and are generated on the sensing electrodes when the tuning fork is made to vibrate in the X-axis direction, and a method for manufacturing the angular velocity sensor. Centers (8d) and (9d) of top electrodes (8c) and (9c) as components of detection units are shifted by ΔW from centers (10) and (11) of main surfaces (3a) and (3b) of arms (1a) and (1b) of the tuning fork vibrator towards side surfaces (3c) and (3e) adjacent to main surfaces (3a) and (3b), respectively.

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