Surface acoustic wave device

Details Surface acoustic wave device Surface acoustic wave device

2005-05-27

2008-09-09

Budd, Mark (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S31300R, C310S31300R

Reexamination Certificate

active

07423365

ABSTRACT:
A surface acoustic wave device includes at least one interdigital transducer having electrodes of a double-layered structure in which an upper film and an underlying film are laminated. The upper film has a main component of Al and a first metal of Ti added to the main component. The underlying film has a main component of Ti.

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