Surface acoustic wave device and method for producing the same

Details Surface acoustic wave device and method for producing the same Surface acoustic wave device and method for producing the same

1992-06-05

1994-07-12

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310313A, H01L 4118

Patent

active

053292081

ABSTRACT:
A surface acoustic wave device having a diamond layer, a piezoelectric layer and a comb-like electrode, in which the piezoelectric layer and the comb-like electrode are formed on a surface of the diamond layer, which surface has been contacted to a substrate used in the formation of the diamond layer by a vapor phase growth method, which device has high stability and can be produced economically.

REFERENCES:
patent: 4025954 (1977-05-01), Bert
patent: 4817102 (1989-03-01), Maurer et al.
patent: 4952832 (1990-08-01), Imai et al.
patent: 4978879 (1990-12-01), Satoh et al.
patent: 5061870 (1991-10-01), Ieki et al.
patent: 5160869 (1992-11-01), Nakahata et al.

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