Radiant energy – Photocells; circuits and apparatus – Photocell controlled circuit
Reexamination Certificate
2005-07-14
2008-09-09
Epps, Georgia Y. (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
Photocell controlled circuit
C250S21400C, C250S214100
Reexamination Certificate
active
07423250
ABSTRACT:
Inspection systems, circuits and methods are provided to enhance defect detection by addressing saturation levels of the amplifier and analog-digital circuitry as a limiting factor of the measurement detection range of an inspection system. In accordance with one embodiment of the invention, a method for inspecting a specimen includes directing light to the specimen and detecting light scattered from the specimen. However, the step of detecting may use only one photodetector for detecting the light scattered from the specimen and for converting the light into an electrical signal. The step of detecting also includes generating a first signal and a second signal in response to the electrical signal, where the second signal differs from the first. For example, the first signal may be generated to have a higher resolution than the second signal for detecting substantially lower levels of the scattered light. In most cases, the method may use the first signal for detecting features, defects or light scattering properties of the specimen until the first signal reaches a predetermined threshold value. Once the predetermined threshold value is reached, however, the method may use the second signal for said detecting.
REFERENCES:
patent: 3488434 (1970-01-01), Farber
patent: 3997779 (1976-12-01), Rabl
patent: 4048510 (1977-09-01), Clarke et al.
patent: 4767211 (1988-08-01), Munakata et al.
patent: 4806776 (1989-02-01), Kley
patent: 5076692 (1991-12-01), Neukermans et al.
patent: 5793230 (1998-08-01), Chu et al.
patent: 5860972 (1999-01-01), Hoang
patent: 6002122 (1999-12-01), Wolf
patent: 6188473 (2001-02-01), Leistner et al.
patent: 6348682 (2002-02-01), Lee
patent: 6448064 (2002-09-01), Vo-Dinh et al.
patent: 6621571 (2003-09-01), Maeda et al.
patent: 6833913 (2004-12-01), Wolf et al.
patent: 7109463 (2006-09-01), Milshtein et al.
patent: 2002/0043109 (2002-04-01), Siu
patent: 2002/0043614 (2002-04-01), Miyamoto et al.
patent: 2003/0047667 (2003-03-01), Filkins et al.
patent: 2003/0058433 (2003-03-01), Almogy et al.
patent: 2003/0174324 (2003-09-01), Sandstrom
patent: 2004/0016867 (2004-01-01), Milshtein et al.
patent: 2004/0054303 (2004-03-01), Taylor
patent: 2004/0095573 (2004-05-01), Tsai et al.
patent: 2004/0198028 (2004-10-01), Tanaka et al.
patent: 2005/0092899 (2005-05-01), Wolf et al.
patent: 2006/0066843 (2006-03-01), Guetta et al.
patent: 2007/0013898 (2007-01-01), Wolters et al.
patent: 2007/0013899 (2007-01-01), Wolters et al.
International Search Report and Written Opinion for PCT Application No. PCT/US06/27129 dated Jan. 17, 2007.
Romanovsky Anatoly
Slobodov Alexander
Wolters Christian H.
Baker & McKenzie LLP
Epps Georgia Y.
KLA-Tencor Technologies Corp.
Wyatt Kevin
LandOfFree
Systems, circuits and methods for extending the detection... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Systems, circuits and methods for extending the detection..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Systems, circuits and methods for extending the detection... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3989293