Micromachined microwave signal control device and method for...

Details Micromachined microwave signal control device and method for... Micromachined microwave signal control device and method for...

2005-06-08

2008-09-02

Takaoka, Dean (Department: 2817)

Wave transmission lines and networks

Coupling networks

Wave filters including long line elements

C333S262000

Reexamination Certificate

active

07420442

ABSTRACT:
A method for fabricating a signal controller, e.g., a filter or a switch, for a coplanar waveguide during the LIGA fabrication process of the waveguide. Both patterns for the waveguide and patterns for the signal controllers are created on a mask. Radiation travels through the mask and reaches a photoresist layer on a substrate. The irradiated portions are removed and channels are formed on the substrate. A metal is filled into the channels to form the conductors of the waveguide and the signal controllers. Micromachined quasi-lumped elements are used alone or together as filters. The switch includes a comb drive, a spring, a metal plunger, and anchors.

REFERENCES:
patent: 6606017 (2003-08-01), Xu et al.

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