Surface acoustic wave device

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Reexamination Certificate

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Details

C333S187000, C333S193000, C333S195000

Reexamination Certificate

active

07425788

ABSTRACT:
In a surface acoustic wave device, a plurality of grooves are provided on a piezoelectric substrate, an electrode film defining an IDT electrode is formed by filling an electrode material in the grooves, an insulator layer, such as a SiO2film, is arranged so as to cover the piezoelectric substrate and the electrode film formed in the grooves, and the surface of the insulator layer is flattened.

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Official Communication for PCT Application No. PCT/JP2005/013462; mailed on Nov. 8, 2005.

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