Method of manufacturing electrostatic deflector, and...

Details Method of manufacturing electrostatic deflector, and... Method of manufacturing electrostatic deflector, and...

2006-05-09

2008-10-14

Berman, Jack I. (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S400000

Reexamination Certificate

active

07435969

ABSTRACT:
An electrostatic deflector that can be manufactured easily and very accurately without using a member for positioning is provided. After multiple slits81dto88dhave been formed in the same direction as that of the bus bar of an approximately conical electrode material100whose large-diameter section is formed with flange portions81ato88afor installation on an insulator90, each of the flange portions is coupled with the insulator90, then the electrode material100is cut along extension lines of the slits81dto88d, and thus, multiple electrode members electrically isolated from one another are formed.

REFERENCES:
patent: 4200794 (1980-04-01), Newberry et al.
patent: 4769542 (1988-09-01), Rockett

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