Radiant energy – Photocells; circuits and apparatus – Housings
Reexamination Certificate
2006-06-05
2008-05-27
Le, Que T (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
Housings
C250S227110
Reexamination Certificate
active
07378646
ABSTRACT:
An optical microbench configured to facilitate wafer-level testing of opto-electronic devices is provided. The optical microbench includes an optoelectronic device mounted to a wafer in which the optical microbench is provided. The optical microbench also includes a beam deflector provided in the wafer and disposed along the optical path of the optoelectronic device. The beam deflector is configured to deflect a portion of the optical path to lie along a direction oriented out of the plane of the wafer. The optical microbench further includes an optical feed-through disposed along the optical path between the optoelectronic device and the beam deflector. The optical feed-through is configured to conduct an optical signal between the beam deflector and the optoelectronic device. A method for testing optoelectronic devices at the wafer level is also provided.
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Baskin Jonathan D.
Le Que T
Rohm and Haas Electronic Materials LLC
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