Lithographic apparatus and substrate edge seal

Details Lithographic apparatus and substrate edge seal Lithographic apparatus and substrate edge seal

2005-12-27

2008-09-02

Lee, John R (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

C355S030000

Reexamination Certificate

active

07420194

ABSTRACT:
A method of helping to prevent liquid reaching under a substrate is disclosed that includes introducing a gas at a bottom edge of the substrate so that a buffer is created at the edge of the substrate, helping to keep immersion liquid that is present at the top and edge of the substrate away from the bottom surface of the substrate.

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