Micromirror and micromirror device

Details Micromirror and micromirror device Micromirror and micromirror device

2006-12-27

2008-05-13

Lester, Evelyn A. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S223100, C359S224200, C359S290000, C359S292000, C359S298000, C359S316000, C359S318000, C345S085000, C345S108000, C348S770000, C348S771000

Reexamination Certificate

active

07372620

ABSTRACT:
There is provided a micromirror which includes a holding unit, a mirror that is held by the holding unit to be pivotable about a rotation axis of the mirror, a first fixed electrode group including a plurality of electrodes fixed to the holding unit, a second fixed electrode group including a plurality of electrodes fixed to the holding unit, a first movable electrode group including a plurality of electrodes fixed to the mirror and located adjacently to the first fixed electrode group, and a second movable electrode group including a plurality of electrodes fixed to the mirror and located adjacently to the second fixed electrode group.

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U.S. Appl. No. 11/616,433 to Esashi et al., which was filed Dec. 27, 2006.

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