Substrate-holding technique

Details Substrate-holding technique Substrate-holding technique

2004-12-03

2008-05-27

Nguyen, Hung Henry (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S075000

Reexamination Certificate

active

07379162

ABSTRACT:
A substrate holding apparatus contacts an undersurface of a substrate and holds the substrate. At least a portion of a top surface of the substrate is to be immersed in liquid. The apparatus includes a chuck unit to attract the substrate and a preventing system to prevent the liquid from reaching the undersurface of the substrate.

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Japanese Office Action dated Apr. 4, 2007, issued in corresponding Japanese patent application No. 2003-409446, with English translation.
Japanese Office Action dated Nov. 28, 2007, in Japanese Patent Application No. 2003-409446 with English-language translation.

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