Stage control apparatus and method, stage apparatus and...

Details Stage control apparatus and method, stage apparatus and... Stage control apparatus and method, stage apparatus and...

2006-01-25

2008-03-11

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S053000, C355S055000

Reexamination Certificate

active

07342645

ABSTRACT:
A stage control apparatus for controlling a stage on which a substrate can be placed and moved generates a target value relating to a vertical direction of the stage based upon substrate surface position information that corresponds to unevenness of the surface of the substrate and generates a drive command signal of the stage based upon a deviation signal between the target value generated and a measured position of the stage. A target frequency is decided upon a spatial frequency possessed by the unevenness of the substrate surface. In order to generate the drive command signal, use is made of a signal obtained by amplifying a component of the target frequency of the deviation signal.

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patent: 2002-280283 (2002-09-01), None

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