Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2004-09-08
2008-03-18
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S030000
Reexamination Certificate
active
07345737
ABSTRACT:
An exposure apparatus for exposing a substrate to light via a pattern of a reticle. The apparatus includes a first substrate stage configured to hold a substrate chuck and the substrate on the substrate chuck and to move in a measurement area, a measurement unit arranged in the measurement area and configured to measure the held substrate to obtain information for positioning the substrate in an exposure area, a second substrate stage configured to hold the substrate chuck and the measured substrate on the substrate chuck, to move in the exposure area, and to position the measured substrate based on the obtained information, a projection optical system arranged in the exposure area and configured to project the pattern onto the positioned substrate while a gap between the projection optical system and the positioned substrate is filled with liquid, a conveyance unit configured to convey the substrate chuck and the measured substrate from the first substrate stage to the second substrate stage, and a supply unit arranged between the measurement area and the exposure area and configured to supply the liquid on the measured substrate.
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Japanese Office Action dated May 18, 2006, issued in corresponding Japanese patent application No. 2003-317323.
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
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