Methods and apparatus for inline variability measurement of...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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C324S763010, C324S762010

Reexamination Certificate

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07342406

ABSTRACT:
A method of measuring variability of integrated circuit components is provided. A specified parameter of at least one first array configuration comprising a plurality of the integrated circuit components without specified internal connections between the integrated circuit components is measured. The specified parameter of at least one second array configuration comprising a plurality of the integrated circuit components nominally identical to those of the first array configuration with specified internal connections between the integrated circuit components is also measured. A variation coefficient is determined for the integrated circuit components based on the measured specified parameter of the at least one first array configuration and the at least one second array configuration.

REFERENCES:
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patent: 6281696 (2001-08-01), Voogel
patent: 6503765 (2003-01-01), Chao et al.
patent: 6784685 (2004-08-01), Chao et al.
K. Terada et al., entitled “A Test Circuit for Measuring MOSFET Threshold Voltage Mismatch,” Microelectronic Test Structures, International Conference, pp. 227-231, 2003.
K. Terada et al., entitled “Further Study of VTH-Mismatch Evaluation Circuit,” Proc. IEEE 2004 Int. Conference on Microelectronic Test Structures, vol. 17, pp. 155-159, Mar. 2004.

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