Light source apparatus and exposure apparatus having the same

Details Light source apparatus and exposure apparatus having the same Light source apparatus and exposure apparatus having the same

2005-04-18

2008-03-25

Kim, Robert (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S492100, C250S493100

Reexamination Certificate

active

07348582

ABSTRACT:
A light source apparatus for irradiating a laser light onto a target, for generating plasma, and for producing light from the plasma, said light source apparatus includes a first detection part for detecting a position of the target, an adjusting part for adjusting a position of a condenser point of the laser light, and a first controller for controlling the adjusting part so that the position of the target detected by the first detection part is corresponding to the condenser point of the laser light.

REFERENCES:
patent: 7068367 (2006-06-01), Stobrawa et al.
patent: 7091507 (2006-08-01), Masaki et al.
patent: 2005/0178979 (2005-08-01), Masaki et al.
patent: 2005/0205811 (2005-09-01), Partlo et al.
patent: 2006/0011870 (2006-01-01), Yamamoto et al.
patent: 2000-56099 (2000-02-01), None

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