Piezoelectric resonator, filter and electronic component...

Details Piezoelectric resonator, filter and electronic component... Piezoelectric resonator, filter and electronic component...

2004-07-29

2008-03-25

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S334000, C333S187000, C333S189000

Reexamination Certificate

active

07348714

ABSTRACT:
A piezoelectric resonator includes; a lower electrode24formed on a substrate11; a piezoelectric film23formed on the lower electrode24; an upper electrode25formed on the piezoelectric film23and obtaining, in collaboration with the lower electrode24, a signal having a predetermined resonance frequency by a propagation of a bulk acoustic wave inside the piezoelectric film23; and an acoustic multilayer reflective film28including an SiO2film28ahaving a predetermined acoustic impedance and an AIN film28bhaving an acoustic impedance higher than the SiO2film28a, and reflecting the bulk acoustic wave, the SiO2film28aand the AIN film28bbeing alternately stacked on the upper electrode25, and the SiO2film28abeing in contact with the upper electrode25.

REFERENCES:
patent: 5821833 (1998-10-01), Lakin
patent: 6548942 (2003-04-01), Panasik
patent: 6720844 (2004-04-01), Lakin
patent: 6864619 (2005-03-01), Aigner et al.
patent: 7057478 (2006-06-01), Korden et al.
patent: 2003/0117238 (2003-06-01), Takeishi et al.
Yasuaki Ishida, et al., “Improvement of Temperature Characteristics of Solidly Mounted Piezoelectric Thin-Film Resonators”, Jan. 30, 2003, 81st Research Symposium Report, pp. 7-11.

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