Nanoscale displacement detector

Details Nanoscale displacement detector Nanoscale displacement detector

2005-11-16

2008-03-25

Raevis, Robert (Department: 2856)

Measuring and testing

Surface and cutting edge testing

Roughness

C356S501000

Reexamination Certificate

active

07347085

ABSTRACT:
A nanoscale displacement detector includes a cantilever integrated with an optical resonator, referred to herein as a “microresonator.” The microresonator and cantilever are configured such that displacement of the cantilever relative to the microresonator causes a change in the resonant frequency of the microresonator. The change in the resonant frequency of the microresonator is used to monitor cantilever displacement. In an embodiment, the microresonator includes a cavity that faces the cantilever and the cantilever includes a protrusion that faces the microresonator and is aligned with the cavity.

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patent: 2005/0264825 (2005-12-01), Frederix et al.
Akahane, Yoshihiro, Asano, Takashi, Song, Bong-Shik, Noda, Susumu, “Fine-tuned high-Q photonic-crystal nanocavity,” Feb. 21, 2005/ vol. 13, No. 4/ Optics Express pp. 1202-1214.
Akahane, Yoshihiro, Asano, Takashi, Song, Bong-Shik, Noda, Susumu, “High-Q photonic nanocavity in a two-dimensional photonic crystal,” Oct. 30, 2003/ vol. 425/NATURE, pp. 944-947.

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