Method of producing an inertial sensor

Details Method of producing an inertial sensor Method of producing an inertial sensor

2006-03-09

2008-07-22

Kim, Paul D (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S592100, C029S594000, C029S609100, C073S504120, C073S504130, C073S504140

Reexamination Certificate

active

07401397

ABSTRACT:
The present invention discloses an inertial sensor comprising a planar mechanical resonator with embedded sensing and actuation for substantially in-plane vibration and having a central rigid support for the resonator. At least one excitation or torquer electrode is disposed within an interior of the resonator to excite in-plane vibration of the resonator and at least one sensing or pickoff electrode is disposed within the interior of the resonator for sensing the motion of the excited resonator. In one embodiment, the planar resonator includes a plurality of slots in an annular pattern; in another embodiment, the planar mechanical resonator comprises four masses; each embodiment having a simple degenerate pair of in-plane vibration modes.

REFERENCES:
patent: 6343509 (2002-02-01), Fell et al.
patent: 6401534 (2002-06-01), Fell et al.
patent: 6805007 (2004-10-01), Fell et al.
patent: 6823734 (2004-11-01), Hayworth et al.

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