Method of calibrating a lithographic apparatus and device...

Photocopying – Projection printing and copying cameras – Step and repeat

Reexamination Certificate

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C355S072000, C355S077000, C378S034000

Reexamination Certificate

active

07426011

ABSTRACT:
In calibration of overlay performance of an immersion lithographic apparatus, two sets of overlay data are obtained from exposures carried out using normal and reversed meanders. The two data sets can then be used to eliminate effects due to wafer cooling.

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European Search Report for EP Appl. No. 06254621.3-1226 issued Dec. 19, 2006.

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