Communications: electrical – Condition responsive indicating system – With particular system function
Reexamination Certificate
2005-06-08
2008-01-22
Pope, Daryl C (Department: 2612)
Communications: electrical
Condition responsive indicating system
With particular system function
C340S679000, C340S680000, C340S686100, C340S686200, C340S686400, C340S686500
Reexamination Certificate
active
07321299
ABSTRACT:
Method and apparatus for use in setting up workpiece treatment or processing equipment. A disclosed system processes silicon wafers that are treated during processing steps in producing semiconductor integrated circuits. The processing equipment includes a wafer support that supports a wafer in a treatment region during wafer processing. A housing provides a controlled environment within the housing interior for processing the wafer on the wafer support. A mechanical transfer system transports wafers to and from the support. A wafer simulator is used to simulate wafer movement and includes a pressure sensor for monitoring contact between the simulator and the wafer transfer and support equipment. In one illustrated embodiment the wafer simulator is generally circular and includes three equally spaced pressure sensors for monitoring contact with wafer transport and support equipment.
REFERENCES:
patent: 6763281 (2004-07-01), Schauer et al.
patent: 7158857 (2007-01-01), Schauer et al.
Bernhardt David K.
Negrotti Jerry F.
Polner Donald N.
Verrier Kevin R.
Axcelis Technologies Inc.
Pope Daryl C
Tarolli, Sundheim Covell & Tummino LLP
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