Process for forming deposited film by use of alkyl aluminum hydr

Details Process for forming deposited film by use of alkyl aluminum hydr Process for forming deposited film by use of alkyl aluminum hydr

1992-06-23

1994-07-12

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437192, 437195, 437245, H01L 21285

Patent

active

053288734

ABSTRACT:
A process for forming an Al film of good quality according to the CVD method utilizing the reaction between alkyl aluminum hydride and hydrogen, which is an excellent deposited film formation process also capable of selective deposition of Al.

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