Plasmaless dry contact cleaning method using interhalogen...

Details Plasmaless dry contact cleaning method using interhalogen... Plasmaless dry contact cleaning method using interhalogen...

2008-05-13

2008-05-13

Ahmed, Shamim (Department: 1792)

Measuring and testing

C438S700000, C438S722000, C438S723000, C216S058000, C134S001300

Reexamination Certificate

active

11387660

ABSTRACT:
A method of removing an oxide layer from an article. The article may be located in a reaction chamber into which an interhalogen compound reactive with the oxide layer is introduced. A temperature of the reaction chamber may be modified so as to remove the oxide layer. The interhalogen compound may form volatile by-product gases upon reaction with the oxide layer. Unreacted interhalogen compound and volatile by-product gases may then be removed from the reaction chamber.

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