Linear motor, exposure apparatus using the same, and device...

Details Linear motor, exposure apparatus using the same, and device... Linear motor, exposure apparatus using the same, and device...

2008-04-22

2008-04-22

Nguyen, Tran (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

C310S216006, C029S596000

Reexamination Certificate

active

10987028

ABSTRACT:
In a movable magnet-type linear motor including a stator having a plurality of iron core elements arranged at a certain slot pitch and a movable part having a magnet3which is movable in an arrangement direction one or more pseudo-slots are provided between adjacent slots, and the iron core element and the magnet are relatively skewed by an approximately apparent slot pitch including the pseudo-slot.

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