Interferometry systems and methods of using interferometry...

Details Interferometry systems and methods of using interferometry... Interferometry systems and methods of using interferometry...

2008-05-20

2008-05-20

Connolly, Patrick (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S508000, C356S511000

Reexamination Certificate

active

11365991

ABSTRACT:
In general, in one aspect, the invention features methods that include interferometrically monitoring a distance between an interferometry assembly and a measurement object along each of three different measurement axes while moving the measurement object relative to the interferometry assembly. The methods also include monitoring an orientation angle of the measurement object with respect to a rotation axis non-parallel to the three different measurement axes while the measurement object is moving, determining values of a parameter for different positions of the measurement object from the monitored distances, wherein for a given position the parameter is based on the distances of the measurement object along each of the three different measurement axes at the given position, and deriving information about a surface figure profile of the measurement object from a frequency transform of at least the parameter values. Deriving the information includes accounting for variations of the monitored orientation angle during the measurement object's motion.

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