Semiconductor production system, cluster tool, control...

Details Semiconductor production system, cluster tool, control... Semiconductor production system, cluster tool, control...

2008-05-06

2008-05-06

Rodriguez, Saul (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

C414S939000, C700S218000

Reexamination Certificate

active

10471289

ABSTRACT:
PS control sections MC1, MC2configured to independently control the operations in process ships PS1, PS2are provided respectively, and an LM control section MC3configured to control the operation in a loader module LM is provided independently.With this structure, the operations of the process ships PS1, PS2and the loader module LM can be checked while the process ships PS1, PS2are not coupled to the loader module LM.

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