Apparatus for electroprocessing a workpiece surface

Details Apparatus for electroprocessing a workpiece surface Apparatus for electroprocessing a workpiece surface

2008-03-11

2008-03-11

Wilkins, III, Harry D (Department: 1753)

Chemistry: electrical and wave energy

Apparatus

Electrolytic

C204S199000, C204S22400M, C204S242000, C205S093000, C205S663000

Reexamination Certificate

active

10292750

ABSTRACT:
The present invention deposits a conductive material from an electrolyte solution to a predetermined area of a wafer. The steps that are used when making this application include applying the conductive material to the predetermined area of the wafer using an electrolyte solution disposed on a surface of the wafer, when the wafer is disposed between a cathode and an anode, and preventing accumulation of the conductive material to areas other than the predetermine area by mechanically polishing the other areas while the conductive material is being applied.

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