Monolithic, spatially-separated, common path interferometer

Optics: measuring and testing – By light interference – Having polarization

Reexamination Certificate

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C356S451000, C356S498000

Reexamination Certificate

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11142781

ABSTRACT:
Spatially-separated heterodyne interferometer architecture is combined with monolithic glass construction techniques to provide a monolithic, spatially-separated, common-path interferometer. The monolithic interferometer includes multiple optical components bonded together into a monolithic structure. The bonded components provide both optics and structure for the interferometer, thereby producing a small, compact, and light-weight interferometry system. Beam splitters and combiners are provided on the interfaces between the optical components to direct and combine signal measurement, signal reference and local oscillator beams used in the interferometry system. The spatially-separated architecture reduces cyclic error values below those of polarization-separated interferometers. In addition, the monolithic architecture of the interferometer minimizes the impact of mechanical, thermal, and optical variations within the system.

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patent: 6876451 (2005-04-01), Carlson

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