Thin film magnetic head and process for producing same

Details Thin film magnetic head and process for producing same Thin film magnetic head and process for producing same

1996-11-26

1998-08-11

Wolff, John H.

Dynamic magnetic information storage or retrieval

Head

Core

360113, G11B 5147

Patent

active

057935793

ABSTRACT:
A process for producing a thin film magnetic head comprises a first step of forming a magnetic layer 20 on the surface of a gap spacer layer 9, a second step of forming on the surface of the magnetic layer 20 a lower resist layer 21 shaped to have a smaller width than an upper core layer 11 when seen from above and forming on the resist layer 21 an upper resist layer 22 projecting outward beyond opposite side faces of the resist layer 21 and shaped in conformity with the shape of the upper core layer 11 when seen from above, a third step of shaping the magnetic layer 20 into the upper core layer 11 by ion beam-etching the magnetic layer 20, and a fourth step of removing the lower resist layer 21 and the upper resist layer 22. The core layer 11 consequently formed has a surface including a pair of curved faces R, R smoothly connecting opposite side faces of the layer 11 with respect to the direction of width of a track to the top face of the layer 11, enabling a protective layer forming step to provide a flawless protective layer 14.

REFERENCES:
patent: 4219853 (1980-08-01), Albert et al.
patent: 4943882 (1990-07-01), Wada et al.
patent: 5018037 (1991-05-01), Krounbi et al.
patent: 5218497 (1993-06-01), Tanabe et al.
patent: 5535079 (1996-07-01), Fukazawa et al.
patent: 5609971 (1997-03-01), Matono et al.

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