Method and device for irradiating spots on a layer

Details Method and device for irradiating spots on a layer Method and device for irradiating spots on a layer

2008-07-15

2008-07-15

Mathews, Alan A (Department: 2851)

Radiant energy

Irradiation of objects or material

C355S030000, C355S053000, C430S269000, C430S311000

Reexamination Certificate

active

10539351

ABSTRACT:
For irradiating a layer a radiation beam is directed and focussed to a spot on the layer, relative movement of the layer relative to the optical element is caused so that, successively, different portions of the layer are irradiated and an interspace between a surface of the optical element nearest to the layer is maintained. Furthermore, at least a portion of the interspace through which the radiation irradiates the spot on the layer is maintained filled with a liquid, the liquid being supplied via a supply conduit and flowing out of an outflow opening through a total projected cross-sectional passage area in a plane parallel to the layer. The outflow opening or a plurality of the outflow openings are positioned such that, seen in a direction perpendicular to the layer, the total cross-sectional area has a centre in the portion of the interspace through which the radiation irradiates the spot.

REFERENCES:
patent: 4480910 (1984-11-01), Takanashi et al.
patent: 6236634 (2001-05-01), Lee et al.
patent: 2002/0020821 (2002-02-01), Van Santen et al.
patent: 221 563 (1985-04-01), None
patent: 6-124873 (1994-05-01), None
patent: 10255319 (1998-09-01), None
patent: 9949504 (1999-09-01), None
patent: 0213194 (2002-02-01), None
English Translation of WO 99/49504 (dated Sep. 30, 1999).
English Translation of JP 6-124873 (dated May 6, 1994).
English Translation of JP 10-255319 (dated Sep. 25, 1998).
English Translation of DD 221 563 A1 (dated Apr. 24, 1985).
ISR Publication, International Publication No. WO2004/027590A1.

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